A MEMS Accelerometer Based on Wavelength Modulation Using an Integrated Blazed Grating

This paper reports a microelectromechanical systems (MEMS) optical fiber accelerometer with an integrated blazed grating as a wavelength modulation component. The accelerometer includes a V-shaped cantilever beam, a vertically symmetrical proof mass, and an integrated blazed grating. The accelerometer prototype is fabricated with bulk micromachining processes and is tested. The bandwidth of the ac...