X-ray topo-tomography studies of linear dislocations in silicon single crystals

This article describes complete characterization of the polygonal dislocation half-loops (PDHLs) introduced by scratching and subsequent bending of an Si(111) crystal. The study is based on the X-ray topo-tomography technique using both a conventional laboratory setup and the high-resolution X-ray image-detecting systems at the synchrotron facilities at KIT (Germany) and ESRF (France). Numerical analysis of PDHL images is performed using the Takagi-Taupin equations and the simultaneous algebraic reconstruction technique (SART) tomographic algorithm.