57Fe Mössbauer study of epitaxial TiN thin film grown on MgO (1 0 0) by magnetron sputtering

B. Qi,H.P. Gunnlaugsson,A. Mokhles Gerami,H.P. Gislason,S. Ólafsson,F. Magnus,T.E. Mølholt,H. Masenda,A. Tarazaga Martín-Lueugo,A. Bonanni,P.B. Krastev,V. Masondo,I. Unzueta,K. Bharuth-Ram,K. Johnston,D. Naidoo,J. Schell,P. Schaaf

Applied Surface Science（2019）

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摘要

•57Fe Mössbauer spectroscopy at truly dilute level (<10−3 at%) is applied.•An ultrathin epitaxial TiN thin film structure is studied.•Theoretical calculations are provided to assist the analysis of the experimental measurement results.•The structure and mobility of the lattice defects in the TiN film are probed at atomic scale.

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关键词

TiN,Mössbauer spectroscopy,Epitaxial thin film,Defects

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