Influence of magnetron sputtering conditions on the chemical bonding, structural, morphological and optical behavior of Ta1 − xOx coatings

C.F. Almeida Alves,C. Mansilla,L. Pereira,F. Paumier,T. Girardeau,S. Carvalho

Surface and Coatings Technology（2018）

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摘要

In this work Ta1−xOx coatings were deposited by DC magnetron sputtering in an Ar+O2 atmosphere. The influence of the oxygen partial pressure on the morphology (SEM), structure (XRD), chemical bonding (XPS), thermal oxidation and optical response (FTIR and spectroscopic ellipsometry) of Ta-based films was study.

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关键词

Tantalum oxide,Coatings,Thermal oxidation,Spectroscopic ellipsometry

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