Precursors for p-Type Nickel Oxide: Atmospheric-Pressure Metal–Organic Chemical-Vapour Deposition (MOCVD) of Nickel Oxide Thin Films with High Work Functions

EUROPEAN JOURNAL OF INORGANIC CHEMISTRY(2017)

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摘要
A series of unsymmetrical nickel beta-diketonate derivatives have been synthesised and structurally characterised for application as atmospheric-pressure metal-organic chemical vapour deposition (AP-MOCVD) precursors for nickel oxide.TMEDA)Ni[MeC(O) CHC(O) OEt](2) (TMEDA = tetramethylethylenediamine) was selected and used to deposit NiO films of varying thickness onto commercial indium tin oxide (ITO)-coated glass; the work function of the ITO was raised as a consequence.
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关键词
Chemical vapor deposition,Nickel,Precursors,Semiconductors,Thin films
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