Characterization of p-GaN1−xAsx/n-GaN PN junction diodes

SEMICONDUCTOR SCIENCE AND TECHNOLOGY(2016)

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摘要
The structural properties and electrical conduction mechanisms of p-type amorphous GaN1-xAsx/n-type crystalline GaN PN junction diodes are presented. A hole concentration of 8.5 x 10(19) cm(-3) is achieved which allows a specific contact resistance of 1.3 x 10(-4) Omega cm(2). An increased gallium beam equivalent pressure during growth produces reduced resistivity but can result in the formation of a polycrystalline structure. The conduction mechanism is found to be influenced by the crystallinity of the structure. Temperature dependent current voltage characteristics at low forward bias (<0.35 V) show that conduction is recombination dominated in the amorphous structure whereas a transition from tunneling to recombination is observed in the polycrystalline structure. At higher bias, the currents are space charge limited due to the low carrier density in the n-type region. In reverse bias, tunneling current dominates at low bias (<0.3 V) and recombination current becomes dominant at higher reverse bias.
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关键词
GaN,PN diode,conduction mechanism,p-type doping,amorphous GaNAs
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