图像匹配技术用于扩展原子力显微镜测量范围的应用与研究
Aviation Precision Manufacturing Technology（2004）
Abstract
研究了利用图像匹配技术来扩大原子力显微镜的测量范围的方法,通过对表面粗糙度测量结果的分析验证了该方法的可靠性,并得出了面粗糙度比线粗糙度更能体现试件表面形貌特征的结论.
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Key words
atomic force microscope,image matching,enlarge thescanning scope
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