Structure analysis of bimetallic Co–Au nanoparticles formed by sequential ion implantation

•Co–Au alloy Metallic nanoparticles (MNPs) are formed by ion implantation in silica glass.•The ion ranges of Au ions implantation process have been displayed to show the ion distribution.•EXAFS, AFM and TEM have been used to study the local structural information of imetallic nanoparticles.•With the increase of Au ion implantation, the local environments of Co ions are changed enormously. Three oscillations are determined.