Cu BEOL compatible selector with high selectivity (>107), extremely low off-current (∼pA) and high endurance (>1010)
2015 IEEE International Electron Devices Meeting (IEDM)(2015)
摘要
Selector with high nonlinearity and low leakage current is critical to solve the sneaking current issue in crossbar memory array. In this work, we present a high performance Cu BEOL compatible threshold switching (TS) selector with several outstanding features, such as high nonlinearity (~10
7
), ultra-low off-state leakage current (~pA), robust endurance (> 10
10
), and sufficient on-state current density (~1 MA/cm
2
). The observed threshold switching is resulted from the spontaneously rupture of conductive filament in doped HfO
2
material. By introducing a tunneling layer in series with the TS layer, the leakage current of the selector is dramatically reduced by more than 5 orders of magnitude. The array level benchmark of this TS selector qualifies its promising potential for 3D storage application.
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关键词
high selectivity,extremely low off-current,high endurance,BEOL compatible threshold switching selector,high nonlinearity,ultra-low off-state leakage current,robust endurance,on-state current density,conductive filament,tunneling layer,array level benchmark,memory cell,Cu-HfO2-Pt
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