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Post-fabrication soft trimming of resistive sensors

2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)(2018)

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Abstract
A compact and efficient architecture is introduced as an alternative to laser-trimmed precision thin-film resistor. The purpose is to compensate for process-induced offset in Wheatstone bridges and to avoid the then-obtained degradation in terms of full-scale, non-linearity, power supply noise rejection. Expected advantages are a reduced cost due to the fully-electrical implementation and, depending on the programming technology, a possible re-calibration of high-end sensors.
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Key words
MEMS,Resistive sensor,Trimming,Offset cancellation,Temperature drift reduction,PSRR
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