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Enhancement of catalytic effect for CNT growth at low temperature by PECVD

Thibault Labbaye,Eva Kovacevic,Thomas Lecas,Mohamed-Ramzi Ammar,A. Canizares,Nicole Raimboux,Thomas Strunskus, Cornelia Jaeger,Patrick Simon,Chantal Boulmer-Leborgne

Applied Surface Science（2018）

Cited 11|Views15
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Abstract
•Carbon nanotube carpet grown by PECVD at 480 °C.•Determination of CNT growth rate by in situ Raman spectroscopy.•Activation of Ni catalyst by hydrogen plasma.
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Key words
Carbon nanotube,Plasma,Catalyst activation,In situ Raman,Nanotube growth,Low temperature process
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