Ultra-thin relative humidity sensors for hybrid system-in-foil applications
2017 IEEE SENSORS(2017)
摘要
This paper presents relative humidity sensors based on electrochemical and capacitive principles. The sensors are fabricated on flexible polymer substrates, which are used for ultra-thin chip embedding. The electrochemical sensor consists of spin-coated nanosheets, which shown huge range (about 5 orders of magnitude) and fast response (<; 2 s). The sensor film thickness as well as ionic conductivity change upon moisture absorption. The measured sensor relative conductance change on the flexible substrate is 368%. In addition, a 3-pm thick conventional capacitive sensor is fabricated on the polymer substrate, together with a humidity-insensitive reference capacitor. The measured sensor relative sensitivity is about 75% with a response time of about 6 s. Finally, a sensor system-in-foil is demonstrated using discrete components of the ultra-thin capacitive sensor and a 30-pm thick capacitance-to-digital readout chip.
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关键词
Flexible electronics, Hybrid System-in-Foil, Relative humidity, Electrochemical sensor, Capacitive Sensor
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