STRUCTURE AND PROPERTIES OF NONHYDROGEN GexC1-x FILMS PREPARED BY PLD

Nonhydrogen germanium carbide (GexC1-x) films were prepared by KrF pulsed lasers deposition (PLD), and the effects of different germanium contents on the microstructures, optical properties and adhesion properties of the GexC1-x films were studied. XRD measurements showed that the GexC1-x films with different germanium contents were of amorphous structure. XPS analysis showed that the C/Ge atomic ratios of GexC1-x films were close to those of corresponding targets. The intensity of Ge3d peak in the GexC1-x films increased and the intensity of C1s peak decreased with the increase of the germanium content. The GexC1-x films' sp(3)C bond contents increased from 46.4% to 69.7%. Ellipsometry and infrared transmission spectral measurements showed that the refractive index of GexC1-x films increased from 2.5 to 3.5 at the wavelength of 1 mu m with the increase of germanium content. The extinction coefficient of GexC1-x film was of the order of 10(-3) in the infrared band when the germanium content was less than 10 at.%. The adhesion tests showed that the adhesion performances of GexC1-x films were better when the germanium content increased.