Latchup In Bulk Finfet Technology

C. -T. Dai,S. -H. Chen,D. Linten,M. Scholz,G. Hellings,R. Boschke,J. Karp,M. Hart,G. Groeseneken,M. -D. Ker,A. Mocuta,N. Horiguchi

2017 IEEE International Reliability Physics Symposium (IRPS)（2017）

Cited 15|Views68

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Abstract

Latchup (LU) had been considered to be less important in advanced CMOS technologies. However, I/O interface and analog applications can still operate at high voltage (e.g., 1.8V or 3.3V) in sub-20nm bulk FinFET technologies. LU threats are never eliminated and the sensitivity towards LU is increased in bulk FinFET technology.

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Key words

Latchup,bulk FinFET,silicon control rectifier (SCR)

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