A Torsion MEMS Magnetic Sensor With Permanent Magnet and Fiber-Optic Detection

Liang Long, Minchang Wang,Shaolong Zhong

IEEE Sensors Journal（2016）

Cited 8|Views1

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Abstract

A novel microelectromechanical system (MEMS) magnetic sensor based on fiber-optic detection is presented in this paper. The magnetic field is detected by measuring the tilting motion of a mechanical suspension with permanent magnet attached. When the magnet is magnetized in different directions, the magnetic sensor can detect the in-plane or out-of-plane magnetic field. The MEMS structure was desi...

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Key words

Magnetic sensors,Soft magnetic materials,Perpendicular magnetic anisotropy,Micromechanical devices,Optical fiber sensors,Magnetic fields

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