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氧化锌薄膜场效应晶体管的制备及工艺研究

Xiuzhang WANG,Bowu YAN,Jianlin GUO

Materials Review（2009）

Cited 1|Views0
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Abstract
场效应晶体管是现代微电子技术的重要组成部分.为制备氧化锌薄膜晶体管,分析了氧化锌的p型、n型掺杂特性,对p型掺杂进行了实验分析和理论探讨,比较了各种制备氧化锌薄膜晶体管的工艺特点,展示了ZnO在未来电子和光电子领域的潜在应用.
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Key words
zinc oxide,preparation,thin films,p-type doping
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