MOCVD生长不同Al组分AlGaN薄膜LIU Bin,ZHANG Rong,XIE Zi-li,ZHANG Yu,LI Liang,ZHANG Zeng,LIU Qi-jia,YAO Jin,ZHOU Jian-jun,JI Xiao-li,XIU Xiang-qian,JIANG Ruo-lian,HAN Ping,GONG Hai-meiLaser & Infrared(2007)引用 3|浏览14暂无评分摘要本文研究了利用金属有机物化学汽相淀积系统(MOCVD)生长高质量不同A l组分A lxGa1-xN薄膜(0.13更多查看译文关键词AlGaN,MOCVD,film growthAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要