High throughput scanning μLEED imaging of surface structural heterogeneity: Defective graphene on Cu(111).

•Scanning μLEED measurements performed with a very small electron beam (250 nm) can provide precise quantitative information about structural variations with high spatial resolution.•We have developed the source extraction and photometry-spot profile analysis tool for quantitative evaluation of scanning μLEED data with high throughput.•The application of this tool to evaluate scanning μLEED data obtained for defective graphene on Cu(111) reveals a rich rotational domain structure.