Molecular Electronic Transducer Based Planetary Seismometer With New Fabrication Process

This paper describes a novel design and implementation of a short period seismometer based on molecular electronic transducer (MET) for the purpose of planetary exploration. A silicon on insulator (SOI)-based micro -fabrication is employed to reduce the hydraulic impedance of microfluidic channels in a MET device, resulting in improved noise floor and sensitivity. The resolution reached 1.78 x10(-7) (m/s(2))/root Hz at 1.2 Hz with the sensitivity of 2500V/(m/s(2)).