Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Composition dependent microstructure and optical properties of boron carbide (BxC) thin films deposited by radio frequency-plasma enhanced chemical vapour deposition technique

A. Bute,S. Jena,D. Bhattacharya,S. Kumar,N. Chand,N. Keskar,S. Sinha

Materials Research Bulletin（2019）

Cited 8|Views10
No score
Abstract
•BxC thin films deposited via PECVD shows high reflectivity ∼ 81% at soft X-ray wavelength.•Films with stoichiometric variation obtained at different substrate self-bias values.•Correlation between optical constants and film stoichiometry has been discussed.•Tunability of optical band gap was observed with changing carbon content.
More
Translated text
Key words
A. Carbides,A. Optical materials,B. Plasma deposition,C. X-ray diffraction
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined