Linearization of an Electrostatic Microscanner with Concentrically Tilted Stationary Comb Electrodes

We present linearized characteristics of an electrostatic microscanner having concentrically tilted stationary comb electrodes. The capacitance change rate was designed to be constant so that the electrostatic torque was only a function of the driving voltage. The optical scanning angles were linearized by 5.6 degrees at a driving voltage of up to 30 V.