CMOS Monolithic Electrochemical Gas Sensor Microsystem Using Room Temperature Ionic Liquid

Heyu Yin,Xiaoyi Mu,Haitao Li,Xiaowen Liu,Andrew J. Mason

IEEE Sensors Journal（2018）

引用 12|浏览8

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摘要

The growing demand for personal healthcare monitoring requires a challenging combination of performance, size, power, and cost that is difficult to achieve with existing gas sensor technologies. This paper presents a new CMOS monolithic gas sensor microsystem that meets these requirements through a unique combination of electrochemical readout circuits, post-CMOS planar electrodes, and room temper...

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关键词

Gas detectors,Micromechanical devices,Electrodes,Electrolytes,Instruments,Temperature sensors

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