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The Multi-Mode Resonance in AlN Lamb Wave Resonators

Jie Zou,Chih-Ming Lin,Anming Gao,Albert P. Pisano

Journal of Microelectromechanical Systems（2018）

Cited 68|Views8
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Abstract
The characteristics of the multi-mode resonance behavior of AlN Lamb wave resonators (LWRs) are theoretically and experimentally investigated for the first time in this paper. Adler's approach and finite element method (FEM) are used to calculate the dispersive characteristics of the phase velocity (vp), group velocity (vg), effective coupling coefficient (keff2), and temperature coefficient of fr...
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Key words
Aluminum nitride,III-V semiconductor materials,Resonators,Dispersion,Resonant frequency,Finite element analysis,Electrodes
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