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Optical Coherence Tomography For Laser Transmission Joining Processes In Polymers And Semiconductors

10TH CIRP CONFERENCE ON PHOTONIC TECHNOLOGIES [LANE 2018](2018)

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摘要
Laser transmission welding applications become wide spread technology in joining transparent and turbid materials. The requirement of higher throughputs and lesser rejects support the need of alternative methods to commonly used machine vision or temperature measurements. Optical coherence tomography delivers the opportunity to qualitatively assess transmission welding seems and welding spots even in three dimensions. Fourier Domain Mode Lock Lasers (FDMLs) used in OCT enable high throughput by high sweep rates. Preliminary results of OCT used for qualitatively assessment of laser transmission welded polymers and fiber reinforced plastics are shown as well as first approaches of using OCT in a silicon chip bonding process. (C) 2018 The Authors. Published by Elsevier Ltd.
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关键词
OCT, laser transmission welding, quality control
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