Improvement in antibacterial properties and cytocompatibility of titanium by fluorine and oxygen dual plasma-based surface modification

•Fluoride coatings were produced on titanium by plasma-enhanced chemical vapor deposition.•F and O dual-deposition surface exhibit strong and better sustaining antibacterial properties.•The fluoride coatings show good cytocompatibility, even promote osteoblast differentiation.•The antibacterial mechanism is related to the fluoride ion and metal-fluoride compounds.