Electrochemical Roughening of Thin-Film Platinum for Neural Probe Arrays and Biosensing Applications
JOURNAL OF THE ELECTROCHEMICAL SOCIETY(2018)
摘要
We report a method for electrochemical roughening of thin-film platinum (Pt) electrodes that increases active surface area, decreases electrode impedance, increases charge injection capacity, increases sensitivity of biosensors and improves adhesion of electrochemically deposited films. First, a well-established technique for electrochemical roughening of thick Pt electrodes (wires and foils) by oxidation-reduction pulses was modified for use on thin-film Pt. Optimal roughening of thin-film Pt electrodes with this established protocol in a sulfuric acid solution was found to occur at about four times lower frequency than that typically used for thick Pt. This modification in established procedure created a 21x surface area increase but showed nanoscale cracks from inter-grain Pt dissolution that compromised film integrity. A crack free surface with Pt nanocrystal re-deposition (20-30 nm in size) and higher enhancement in surface area (44x) was obtained when the electrolyte was switched to a non-adsorbing perchloric acid solution. These electrochemically roughened electrodes have charge injection limits comparable to titanium nitride and just below carbon nanotube-based materials. Roughened microelectrodes showed a 2.8x increase in sensitivity to hydrogen peroxide detection, indicative of improved enzymatic biosensor performance. Platinum iridium and iridium oxide coatings on these roughened surfaces showed an improvement in adhesion. (C) The Author(s) 2018. Published by ECS.
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关键词
biosensing applications,neural probe arrays,electrochemical,thin-film
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