1.2 Tbps/cm 2 Enabling Silicon Photonics IC Technology Based on 40-nm Generation Platform

Optical transmitter and receiver ICs, each with a footprint of 25 mm2, were fabricated using a silicon photonics platform based on 40-nm-node CMOS technology. High-speed transmissions of data at 300 Gbps were demonstrated. The wire-type waveguide (WG) in the transmitter IC had a width of 350 nm and a height of 200 nm, and in the completed optical IC, it showed low propagation loss (1.62 dB/cm) for...