A Graphene Platform On Silicon For The Internet Of Everything
2018 IEEE 2ND ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM 2018)(2018)
Abstract
We have pioneered a platform technology able to harness the properties of graphene directly from silicon carbide on silicon substrates for integrated on chip or in-package applications, ranging from sensing and nanophotonics to integrated energy storage. The graphene synthesis is transfer -free and site-selective, leading to straightforward wafer -level fabrication and yielding sufficient adhesion for subsequent processing. This approach among others can pave the way towards miniaturized energy sources in SiP systems for smart nodes of the Internet of Everything.
MoreTranslated text
Key words
graphene, Internet of Everything and integration on silicon
AI Read Science
Must-Reading Tree
Example
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined