Memory performance of MOS structure embedded with laser annealed gold NCs

•Construction of MOS devices containing Au nanocrystals (NCs) created after Laser Annealing.•Investigation on whether Laser Annealing is an effective method for successful NC-based memory device fabrication.•Structural and electrical characterization of MOS devices.•Examination of the NCs role on enhancing the memory device performance.•Role of the Laser Annealing parameters in achieving uniform and small in dimensions NCs.