Study On The Material Removal Function Of Ultrasonic-Assisted Abrasive Flow Polishing Sapphire

As a kind of hard and brittle material, the removal method of sapphire is mainly deformation removal with the scour of abrasive flow, which means that machined surface deform with the scour of abrasive flow, if the deformation is large enough, there could be crack and exfoliation on the material surface or subsurface to achieve the removal of material. Based on the knowledge of contact mechanics, this article deduces the material removal function under single abrasive, abrasive flow and ultrasonic vibration, and finds that it is a favor to polishing under assist of ultrasonic vibration.