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Infrared computer-generated holograms: design and application for the WFIRST grism using wavelength-tuning interferometry

OPTICAL ENGINEERING(2018)

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摘要
Interferometers using computer-generated holograms (CGHs) have become the industry standard to accurately measure aspheric optics. The CGH is a diffractive optical element that can create a phase or amplitude distribution and can be manufactured with low uncertainty using modern lithographic techniques. However, these CGHs have conventionally been used with visible light and piezo-shifting interferometers. Testing the performance of transmissive optics in the infrared requires infrared CGHs and an infrared interferometer. Such an instrument is used in this investigation, which introduces its phase shift via wavelength-tuning. A procedure on how to design and manufacture infrared CGHs and how these were successfully used to model and measure the Wide-Field Infrared Survey Telescope grism elements is provided. Additionally, the paper provides a parametric model, simulation results, and calculations of the errors and measurements that come about when interferometers introduce a phase variation via wavelength-tuning interferometry to measure precision aspheres. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE).
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关键词
optical testing,computer-generated hologram,infrared,wavelength-tuning,interferometry,grism,diffractive optical elements
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