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Tailoring the phase fractions by tuning the pulse frequency in stainless steel films obtained from an 316L target by pulsed-DC magnetron sputtering

Marcus V.F. Schroeder,Abel A.C. Recco,Carlos Mario Garzón

Materials Letters（2018）

Cited 3|Views2
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Abstract
•Pulse frequency affects the fraction of phases in the coating.•Phase fractions observed can be depicted with constrained atomic partitioning.•Prevalence of FCC phase in pulsed-dc instead of BCC in conventional dc was pointed out.•Prevalence of FCC phase in pulsed-dc agrees with an increased average energy of adatoms.
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Key words
Sputtering,Stainless steels,Polyphase microstructure,Thermodynamics,Phase stability
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