Reducing edge effect of temperature-field for large area thin film deposition in hot filament chemical vapor deposition systemLin Li,Shibing Tian,Ruhao Pan,Chao Wang,Chi Sun,Junjie Li,Changzhi GuAdvanced Materials Letters(2018)引用 0|浏览11暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要