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Investigation of the Effect of the Composition of Residual Gases on the Hardness, Adhesion Properties and the Composition of SiC-AlN Coatings Deposited by the Magnetron Sputtering

I. Yu. Gоncharov,D. A. Kolesnikov, V. Ju. Novikov,M. G. Kovaleva,S. V. Lytovchenko,B. A. Mazilin, D. V. Horokh,V. M. Beresnev, David Alejandro Diaz Yanez

Journal of Nano-and electronic Physics（2018）

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Key words
Composite Coatings,Nano-composites,High-Temperature Composite Materials
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