The formation of tungsten and tungsten carbides by CVD synthesis and the proposed mechanism of chemical transformations and crystallization processes

V. V. Dushik,N.V. Rozhanskii,V.O. Lifshits,T.V. Rybkina,V. P. Kuzmin

Materials Letters（2018）

引用 17|浏览4

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摘要

•Low temperature chemical vapor deposition of tungsten and tungsten carbides.•The high microhardness of tungsten coatings caused by carbon supersaturation.•The proposed mechanism of the synthesis of tungsten-carbon compounds.

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关键词

Nanoparticles,Crystal growth,Chemical vapor deposition,Electron microscopy

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