Development Of Multi-Probe Connecting Deviceson Flexible Polyimide Base For Mems Components Testing

Victor Palagin,Ievgenii Razumov-Fryziuk, Iryna Botsman,Viktoriya Nevliudova

2018 XIVTH INTERNATIONAL CONFERENCE ON PERSPECTIVE TECHNOLOGIES AND METHODS IN MEMS DESIGN (MEMSTECH)（2018）

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摘要

In this paper the problems of MEMS components testing are systematized. The design of multi-probe connecting devices on flexible base of polyimide that can be used for such components testing is described. Developed testing devices are researched from the point of view their design, fabrication technology and contact reliability.

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关键词

multi-probe connecting device, testing, polyimide, flexible printed circuit, MEMS component, contact resistance

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