A low-cost, 30 NG/VHZ noise floor MEMS accelerometers for large sensor network

A capacitive MEMS accelerometer with superior features of low cost, noise and power consumption was developed for a large sensor network. A low noise floor of less than 30 nG/√Hz and a low power consumption of 20 mW with a low-cost getter-less vacuum ceramic package were experimentally demonstrated with our proposed sensor architecture: two layers of perforation for low noise and separated servo mass architecture that enables simultaneous operation of detection and servo control for low power.