Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform

In this paper, we propose a location-specific batch fabrication process to form suspended metal nanowire between two microelectrodes. This simple and low temperature fabrication method consists of 3 steps; electrospinning polymer nanofibers on MEMS platform with micro gap, metal evaporation, and dissolving polymer nanofibers in liquid and drying. Here we demonstrate the proposed process with Pd to form suspended Pd nanowire, for the possible future application as hydrogen sensor. The surface tension force during the drying enables the formation of single wire from multiple wires. The proposed method allows diverse choice of nanowire material and thus can find various applications of two-terminal nanowire devices.