Compact prototype microfabricated gas chromatographic analyzer for autonomous determinations of VOC mixtures at typical workplace concentrations

MICROSYSTEMS & NANOENGINEERING(2018)

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摘要
This report concerns a benchtop prototype instrument containing a gas chromatographic microanalytical system (μGC) designed for the selective determination of multiple airborne volatile organic compounds (VOCs) at concentrations in the vicinity of recommended occupational exposure limits. The core microsystem consists of a set of discrete Si-microfabricated devices: a dual-cavity, adsorbent-packed micro-preconcentrator-focuser (μPCF) chip that quantitatively captures and thermally desorbs/injects VOCs with vapor pressures between ~0.03 and 13 kPa; tandem micro-column (μcolumn) chips with cross-linked PDMS wall-coated stationary phases capable of temperature-programmed separations; and an integrated array of five μchemiresistors (μCR) coated with different thiolate-monolayer protected gold nanoparticle (MPN) interface films that quantifies and further differentiates among the analytes by virtue of the response patterns generated. Other key components include a pre-trap for low-volatility interferences, a split-flow injection valve, and an onboard He carrier–gas canister. The assembled unit measures 19×30×14 cm, weighs ~3.5 kg, operates on AC power, and is laptop/LabVIEW controlled. Component- and system-level tests of performance demonstrated injection bandwidths <1 s, a μcolumn capacity of ≥8 μg injected mass, linear calibration curves, no humidity effects, excellent medium-term (that is, 1 week) reproducibility, autonomous operation for 8 h, detection limits below Threshold Limit Values (TLV) for 10 mL air samples collected in 1 min, and response patterns that enhanced vapor recognition. The determination of a 17-VOC mixture in the presence of seven interferences was performed in 4 min. Results augur well for adapting the microsystem to an all-MEMS wearable μGC currently under parallel development.
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关键词
gas chromatography,micro-GC,microsystem,mixtures,sensor array,VOCs
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