Fabrication of ZnO Nanowire Field-Emitter Arrays With Focusing Capability

ZnO nanowire field-emitter arrays (FEAs) show great application potentials in large-area vacuum microelectronics devices. However, the electron divergence is an issue which should be addressed. In this paper, ZnO nanowire FEAs with co-planar focus electrode were designed. A four-mask fabrication process and lift-off process were adopted to achieve the integration of focus electrode. The device dem...