Quantum Confinement and Interface States in ZnO Nanocrystalline Thin-Film Transistors
IEEE Transactions on Electron Devices(2018)
Abstract
The experimental current-voltage (ID-VG) and capacitance-voltage (C-VG) characteristics of the bottomgate/top-contact ZnO thin-film transistors (TFTs) are analyzed accounting for quantum confinement and interface state effects. All the measurements are performed on the same TFTs composed of a 45-nm-thick nanocrystallineZnO channel, indium tin oxide gate electrode, and a 21-nm-thick Al2O3 gate insu...
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Key words
Thin film transistors,Zinc oxide,II-VI semiconductor materials,Frequency measurement,Capacitance,Semiconductor device measurement,Logic gates
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