High displacement resolution encoder by using triple grating combination interferometer
Optics & Laser Technology(2018)
摘要
•The optimal triple gratings combination for a novel displacement sensor.•The optimal resolution can be approximated of 0.1 nm.•The displacement different to comparison method is within 6 μm.•The encoder exhibited high immunity against environmental disturbance.•The smaller displacement variation is better than 1 pm.
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