Development and Characterization of Two-Dimensional Gratings for Single-Shot X-ray Phase-Contrast Imaging

APPLIED SCIENCES-BASEL(2018)

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摘要
Single-shot grating-based phase-contrast imaging techniques offer additional contrast modalities based on the refraction and scattering of X-rays in a robust and versatile configuration. The utilization of a single optical element is possible in such methods, allowing the shortening of the acquisition time and increasing flux efficiency. One of the ways to upgrade single-shot imaging techniques is to utilize customized optical components, such as two-dimensional (2D) X-ray gratings. In this contribution, we present the achievements in the development of 2D gratings with UV lithography and gold electroplating. Absorption gratings represented by periodic free-standing gold pillars with lateral structure sizes from 5 x m to 25 x m and heights from 5 x m to 28 x m have shown a high degree of periodicity and defect-free patterns. Grating performance was tested in a radiographic setup using a self-developed quality assessment algorithm based on the intensity distribution histograms. The algorithm allows the final user to estimate the suitability of a specific grating to be used in a particular setup.
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关键词
2D gratings,UV lithography,grating-based X-ray imaging,single-shot phase-contrast imaging
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