Electrochemical Deposition of Permalloy Films for Magneto-Semiconductor Microsystems
Semiconductors(2018)
摘要
The results of investigating local electrochemical deposition from a chloride electrolyte are presented. Ni 81 Fe 19 permalloy films with magnetic properties similar to those of 3D samples with a uniform thickness and low mechanical stresses without high-temperature annealing are obtained. The dependences of the rate of congruent deposition of the permalloy on the current density are presented.
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关键词
electrolyte,permalloy,electrochemical deposition,magnetic permeability
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