Low-temperature growth and electronic structures of ambipolar Yb-doped zinc tin oxide transparent thin films

•Compositional dependence of the band structure of zinc tin oxide (ZTO) thin films.•The band structure contains band gap, work function, and band edges of ZTO films.•Electron concentrations in the ZTO films were investigated by a Hall measurement.•Work function of the ZTO films was measured by Kelvin probe force microscopy.•The mobility of the n- and p-type ZTO films have 130 and 15 cm2/Vs, respectively.