Exploring silicon oxycarbide films for photonic waveguides

Faisal Ahmed Memon,Francesco Morichetti,Andrea Melloni

2018 15th International Bhurban Conference on Applied Sciences and Technology (IBCAST)（2018）

引用 3|浏览3

暂无评分

摘要

Silicon oxycarbide thin films deposited with reactive rf magnetron sputtering are exploited to fabricate photonics waveguides with two high refractive indices of 1.58 and 1.82 exhibiting index contrast of 8% and 18% with silica glass. The propagation losses are estimated in the telecom wavelength range and the results demonstrate the potential of silicon oxycarbide for photonics applications.

查看译文

关键词

silicon oxycarbide films,photonic waveguides,reactive rf magnetron sputtering,photonics applications,refractive indices,index contrast,silica glass,propagation losses,SiO2,SiOxCy

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要