Growth of high-quality Bi2Se3 topological insulators using (Bi1-xInx)2Se3 buffer layers

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B(2018)

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摘要
In this article, the authors first report on the optimum growth parameters for (Bi1-xInx)(2)Se-3 alloys of arbitrary composition using molecular beam epitaxy. It is found that smooth, single-phase films can only be obtained by using a sequential growth and annealing method to seed the film, after which normal codeposition growth can be used. The topological insulator Bi2Se3 is then grown on top of various (Bi1-xInx)(2)Se-3 buffers and the electrical properties measured. For Bi2Se3 films grown on high-quality buffer layers, the mobility is greatly enhanced and the carrier density reduced compared to growth directly on sapphire substrates, indicating a significant improvement in film quality. The use of an almost lattice-matched trivially insulating buffer layer is therefore crucial to the growth of high-quality topological insulators on arbitrary substrates. Published by the AVS.
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关键词
topological insulators,buffer,bi<sub>2</sub>se<sub>3</sub>,layers,high-quality
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