High-Performance MMIC Inductors for GaN-on-Low-Resistivity Silicon for Microwave Applications

Abdalla Eblabla,Xu Li,David J. Wallis,Ivor Guiney,Khaled Elgaid

IEEE Microwave and Wireless Components Letters（2018）

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摘要

Novel MMIC spiral inductors on GaN-on-low-resistivity silicon (LR-Si) substrates (σ <; 40 Ω · cm) are demonstrated with enhanced self-resonance frequency ( fSRF) and Q-factor. The developed technology improves inductor performance by suppressing substrate coupling effects using air-bridge technology above benzocyclobutene dielectric as an interface layer on the lossy substrate. A 0.83-nH spiral in...

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关键词

Inductors,Silicon,Substrates,Spirals,Q-factor,Integrated circuit modeling,Inductance

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