Application Of Nanocavity Embedded Dual Metal Double Gate Tfet In Biomolecule Detection

2017 IEEE REGION 10 HUMANITARIAN TECHNOLOGY CONFERENCE (R10-HTC)(2017)

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摘要
In this work, prospects of nanocavity embedded Dual Metal Double Gate Tunnel FET device as a label free biosensor have been analyzed for neutral biomolecule detection. A numerical model of the device has been developed in Atlas, Silvaco and device electrical characteristics for the presence of different biomolecules have been observed. Based on the device performance, sensing metrics have been indicated. Sensitivity of the sensing metrics like tunneling current, threshold voltage, Sub-threshold Slope have been analyzed for the presence of varying biomolecules. Additionally, the filling factor of the biomolecules in the cavities has been analyzed. It has also been found that dual metal structure provides better sensitivity than the single metal counterpart.
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关键词
DMDG Tunnel FET, nanogap, TCAD Model, biosensor
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