Femtosecond Laser Micromachining On Backside Of Glass Using Simultaneously Spatially And Temporally Focused Vortex Beams

2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR)（2017）

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摘要

Femtosecond laser micromachining on back surface have been investigated experimentally using simultaneously spatially and temporally focused (SSTF) vortex beams. Uniform ring-shape ablations have been made on back surface of borosilicate glass. The feasibility of laser micromachining using femtosecond SSTF vortex beam has been demonstrated.

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关键词

laser micromachining, simultaneously spatially and temporally focused beam, vortex beam

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